GRIPPER DEVICE IN OVERHEAD CONVEYING VEHICLE
PROBLEM TO BE SOLVED: To prevent a wafer carrier suspended and supported by means of a gripper device in an overhead conveying vehicle from dropping. SOLUTION: In the gripper device A for suspending and supporting the wafer carrier C, a magnet 15 is installed on one side of the end face parts oppose...
Gespeichert in:
Hauptverfasser: | , |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | PROBLEM TO BE SOLVED: To prevent a wafer carrier suspended and supported by means of a gripper device in an overhead conveying vehicle from dropping. SOLUTION: In the gripper device A for suspending and supporting the wafer carrier C, a magnet 15 is installed on one side of the end face parts opposed to each other while a magnetic board 14b is installed on the other side in respective supporting plates 13a, 13b supporting a pair of fingers 4a, 4b constituting the device A. When a pair of fingers 4a, 4b are inserted below a flange 5 of the wafer carrier C so as to be brought close to each other, the magnet 15 and the magnetic plate 14b are attracted mutually by magnetic attraction force. |
---|