GRIPPER DEVICE IN OVERHEAD CONVEYING VEHICLE

PROBLEM TO BE SOLVED: To prevent a wafer carrier suspended and supported by means of a gripper device in an overhead conveying vehicle from dropping. SOLUTION: In the gripper device A for suspending and supporting the wafer carrier C, a magnet 15 is installed on one side of the end face parts oppose...

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Bibliographische Detailangaben
Hauptverfasser: GUNKE NOBUKIMI, INAGAKI MOTONORI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To prevent a wafer carrier suspended and supported by means of a gripper device in an overhead conveying vehicle from dropping. SOLUTION: In the gripper device A for suspending and supporting the wafer carrier C, a magnet 15 is installed on one side of the end face parts opposed to each other while a magnetic board 14b is installed on the other side in respective supporting plates 13a, 13b supporting a pair of fingers 4a, 4b constituting the device A. When a pair of fingers 4a, 4b are inserted below a flange 5 of the wafer carrier C so as to be brought close to each other, the magnet 15 and the magnetic plate 14b are attracted mutually by magnetic attraction force.