METHOD AND DEVICE FOR COATING ELECTROMAGNETIC WAVE SHIELDING FILM

PROBLEM TO BE SOLVED: To provide a coating device for an electromagnetic wave shielding film wherein an adhesion between an object to be coated and the electromagnetic wave shielding film is improved for even coating with no variation, regenerative characteristics in mass production is well, hazard...

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Hauptverfasser:	RI GENSHO, KIN DOKON, KIN TOGEN, RI ENSHO, RI IUNGUCHOKU
Format:	Patent
Sprache:	eng
Schlagworte:	CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS METALLURGY PRINTED CIRCUITS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a coating device for an electromagnetic wave shielding film wherein an adhesion between an object to be coated and the electromagnetic wave shielding film is improved for even coating with no variation, regenerative characteristics in mass production is well, hazard in operation is eliminated, and pollution-free operation is provided by a dry process. SOLUTION: A plurality of objects to be coated are installed at a rotating cylindrical rotary jig. Under this condition, the objects are coated with the electromagnetic wave shielding film by sputtering.