METHOD AND SYSTEM FOR PHYSICAL SURFACE MODIFICATION OF CONDUCTIVE MEMBER

PROBLEM TO BE SOLVED: To provide a new surface modification method and an inexpensive system constitution for improving the resistance to penetration into a base material at sputtering as a weak point of conventional sputtering methods and attaining a new surface modification by ion nitriding. SOLUT...

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Bibliographische Detailangaben
Hauptverfasser:	TERAKADO KAZUYOSHI, YAMAGUCHI SHIZUKA, KAGIYAMA ARATA
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a new surface modification method and an inexpensive system constitution for improving the resistance to penetration into a base material at sputtering as a weak point of conventional sputtering methods and attaining a new surface modification by ion nitriding. SOLUTION: In the method of modifying the surface of a conductive member of metallic material, etc., by connecting an object to be treated and a vacuum chamber to a cathode and an anode, respectively, and generating DC glow discharge between the cathode and the anode, a target to be connected to a cathode different from the above cathode to which the object to be treated is connected is disposed in a manner to be opposed to the object to be treated and sputtering is allowed to occur in the periphery of the target. By this procedure, the surface of the object to be treated can be modified and characteristics such as wear resistance and corrosion resistance can be improved.