PROTECTIVE FILM, TREATING EQUIPMENT FOR SEMICONDUCTOR WAFER AND METHOD FOR DEPOSITING THIN FILM DIAMOND FILM

PROBLEM TO BE SOLVED: To provide a thin diamond film having corrosion resistance similar to that of the conventional thick diamond film. SOLUTION: This thin diamond film is relatively slowly deposited at a relatively low methane concentration and is confirmed by Raman spectrographic characteristics....

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Bibliographische Detailangaben
1. Verfasser:	WINDISCHMANN HENRY
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CRYSTAL GROWTH DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LAYERED PRODUCTS LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM METALLURGY PERFORMING OPERATIONS PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SEMICONDUCTOR DEVICES SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a thin diamond film having corrosion resistance similar to that of the conventional thick diamond film. SOLUTION: This thin diamond film is relatively slowly deposited at a relatively low methane concentration and is confirmed by Raman spectrographic characteristics. The thin diamond film having a thickness, preferably, of 5 to 40 micron brings corrosion and erosion resistance substantially higher in the corrosive environment than those of the other thin films. It is considered that, in the thin diamond film, increased chemical resistance can be obtained by its purity and quality.