METHOD OF MANUFACTURING FERROELECTRIC-MATERIAL CAPACITOR

METHOD OF MANUFACTURING FERROELECTRIC-MATERIAL CAPACITOR

PROBLEM TO BE SOLVED: To provide an executable method of manufacturing, with only a little labor, a ferroelectric-material capacitor having two pieces or more of withstand voltage which are different from each other. SOLUTION: First, a first electrode structure 11 having the surface which forms at l...

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Bibliographische Detailangaben
Hauptverfasser: KASKO IGOR, WEINRICH VOLKER, HARTNER WALTER, SCHINDLER GUENTHER DR
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide an executable method of manufacturing, with only a little labor, a ferroelectric-material capacitor having two pieces or more of withstand voltage which are different from each other. SOLUTION: First, a first electrode structure 11 having the surface which forms at least two-height levels is formed on a substrate 1, a ferroelectric- material layer 13 having a variety of layer thickness is laminated on the first electrode structure 11 by spin coating, and in succession, a second electrode structure 12 is formed on the ferroelectric-material layer 13.