SYSTEM, METHOD, AND MEDIUM FOR CONTROLLING MULTIPLE TOOLS

PROBLEM TO BE SOLVED: To provide a system, method, and medium for facilitating communication between tools in a semiconductor (for example, wafer) treatment facility. SOLUTION: From the viewpoint of the quantity and/or quality of a final semiconductor product, the system, method, and medium which can make larger control for the whole semiconductor product output of a group of tools are provided. The control includes communication control (210 and 214), which makes the direct communication between tools 1 and 2 possible (for example through, a communication link 220) without using any separated module controller 216. The tools 1 and 2 include sufficient 'information' (for example, computer mechanisms incorporated in the communication control 210 and/or 214 for making communication by processing the information on a wafer treated by means of the tools 1 and 2). This information enables the tools 1 and 2 to communicate directly with each other and utilizes at least several various protocols and techniques.