STAGE APPARATUS
PROBLEM TO BE SOLVED: To provide a simple, space-saving and high-precision stage drive mechanism. SOLUTION: The rotation of an X motor 9 and a Y motor 20 is taken up by means of a slanted central shaft 2a. An X ball screw 7 is rotated directly by means of an X belt 11, and a Y ball screw 29 is rotat...
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| creator | KUROSAKI TOSHISHIGE KURIMOTO KOZO |
| description | PROBLEM TO BE SOLVED: To provide a simple, space-saving and high-precision stage drive mechanism. SOLUTION: The rotation of an X motor 9 and a Y motor 20 is taken up by means of a slanted central shaft 2a. An X ball screw 7 is rotated directly by means of an X belt 11, and a Y ball screw 29 is rotated via a belt 25, a spline shaft 27, a bevel gear 28a and a bevel gear 28b with built-in spline mechanism. |
| format | Patent |
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An X ball screw 7 is rotated directly by means of an X belt 11, and a Y ball screw 29 is rotated via a belt 25, a spline shaft 27, a bevel gear 28a and a bevel gear 28b with built-in spline mechanism.</description><edition>7</edition><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILSOF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; INSTRUMENT DETAILS ; PHYSICS ; SEMICONDUCTOR DEVICES</subject><creationdate>2001</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20010824&DB=EPODOC&CC=JP&NR=2001229867A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20010824&DB=EPODOC&CC=JP&NR=2001229867A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>KUROSAKI TOSHISHIGE</creatorcontrib><creatorcontrib>KURIMOTO KOZO</creatorcontrib><title>STAGE APPARATUS</title><description>PROBLEM TO BE SOLVED: To provide a simple, space-saving and high-precision stage drive mechanism. SOLUTION: The rotation of an X motor 9 and a Y motor 20 is taken up by means of a slanted central shaft 2a. 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| subjects | BASIC ELECTRIC ELEMENTS CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILSOF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INSTRUMENT DETAILS PHYSICS SEMICONDUCTOR DEVICES |
| title | STAGE APPARATUS |
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