STAGE APPARATUS

PROBLEM TO BE SOLVED: To provide a simple, space-saving and high-precision stage drive mechanism. SOLUTION: The rotation of an X motor 9 and a Y motor 20 is taken up by means of a slanted central shaft 2a. An X ball screw 7 is rotated directly by means of an X belt 11, and a Y ball screw 29 is rotat...

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Bibliographische Detailangaben
Hauptverfasser:	KUROSAKI TOSHISHIGE, KURIMOTO KOZO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILSOF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INSTRUMENT DETAILS PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a simple, space-saving and high-precision stage drive mechanism. SOLUTION: The rotation of an X motor 9 and a Y motor 20 is taken up by means of a slanted central shaft 2a. An X ball screw 7 is rotated directly by means of an X belt 11, and a Y ball screw 29 is rotated via a belt 25, a spline shaft 27, a bevel gear 28a and a bevel gear 28b with built-in spline mechanism.