MICRO-MANIPULATOR FOR ELECTRON MICROSCOPE

PROBLEM TO BE SOLVED: To enable fine operation for an organism specimen and application of a voltage to a semiconductor specimen. SOLUTION: Two needles 12, 12', electrically insulated, are inserted into a specimen room 2 and fine operation for a specimen is performed by using a control portion...

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Bibliographische Detailangaben
Hauptverfasser:	AOKI YASUSHI, TANIGUCHI YOSHIFUMI, ONOSE MASAMI, UKIANA MOTOHIDE
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To enable fine operation for an organism specimen and application of a voltage to a semiconductor specimen. SOLUTION: Two needles 12, 12', electrically insulated, are inserted into a specimen room 2 and fine operation for a specimen is performed by using a control portion 7A of a rotor 7 and a control 11. An electric signal is detected through leads 15, 15' drawn out of the needles 12, 12' and a further voltage can be applied to the specimen. Fine operation for the organism specimen can be performed and potential distribution and field strength distribution can be observed with the application of a voltage to a semiconductor specimen.