FUSE PART OF SEMICONDUCTOR ELEMENT, AND FORMATION METHOD THEREFOR

PROBLEM TO BE SOLVED: To provide the fuse part of a semiconductor element, and its formation method. SOLUTION: A protective film, that is made of a passivation film 144, is provided to prevent moisture from entering from the sidewall of a fuse opening 148. For forming the protective film, first, an...

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Bibliographische Detailangaben

Hauptverfasser:	PARK YOUNG-HOON, KHO SUNG-HOON, LEE CHI-HOON, HAN KODO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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