METHOD AND APPARATUS FOR MEASURING CONCENTRATION OF HYDROGEN REPOXIDE VAPOR IN CHAMBER

PROBLEM TO BE SOLVED: To provide a method and an apparatus for simply measuring the concentration of a hydrogen peroxide vapor at a low cost. SOLUTION: The concentration A of the hydrogen peroxide vapor contained in a gas in a chamber 1 is calculated by A=(C1-C2)/(B--E/D) by using the detected value...

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1. Verfasser: KOKUBO MAMORU
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a method and an apparatus for simply measuring the concentration of a hydrogen peroxide vapor at a low cost. SOLUTION: The concentration A of the hydrogen peroxide vapor contained in a gas in a chamber 1 is calculated by A=(C1-C2)/(B--E/D) by using the detected value C1 regarding the gas in the chamber 1 detected by a first humidity sensor 3 having characteristics reacting in proportion to the concentration of the vapor and the detected value C2 of the gas after the vapor in the gas detected by a second humidity sensor 7 is decomposed into a steam and an oxygen, wherein B is a reaction coefficient for reacting in response to the concentration of the vapor by the first sensor experimentally obtained in advance to the detected value, D is the molecular weight of the hydrogen peroxide, and E is the molecular weight of the water.