BOARD-PROCESSING APPARATUS

PROBLEM TO BE SOLVED: To provide a board-processing apparatus that can save energy, efficiently control the temperature and moisture of an air or adult the temperature of liquid, and realize space savings. SOLUTION: A coating developing device 1 is provided with an air supply device 81 for supplying...

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Bibliographische Detailangaben
Hauptverfasser:	SENBA NORIO, UEDA KAZUNARI, AKUMOTO MASAMI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a board-processing apparatus that can save energy, efficiently control the temperature and moisture of an air or adult the temperature of liquid, and realize space savings. SOLUTION: A coating developing device 1 is provided with an air supply device 81 for supplying air in a cup 24 which houses a wafer W, a constant temperature water device 82 for supplying a temperature controlled water for temperature adjustment, and a cooling device 50 for cooling the wafer W. The cooling device 50 is provided with a passage 93 for distributing cooling water, and the air supply device 81 is provided with a cooling/moisture reducing part 85 therein to cool the air, temperature controlled water and cooling water.