METHOD AND DEVICE FOR POLISHING AND POLISHING CARRIER USED FOR IT

PROBLEM TO BE SOLVED: To provide a method and device for polishing both front and back faces of a work held inside a work holding hole while rotating and revolving a polishing carrier between an upper surface plate and a lower surface plate to prevent excessive contact resistance of the work with th...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NASUNO KENJI, NOMIZO OSAMU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING SEMICONDUCTOR DEVICES TRANSPORTING
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