SUBSTRATE-POSITIONING DEVICE

PROBLEM TO BE SOLVED: To conduct accurate-positioning without overloading the substrate and without a high-precise position detector and position a substrate with high accuracy. SOLUTION: In a substrate-positioning device in which a substrate is abutted on a positioning member provided in a tool, wh...

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Bibliographische Detailangaben
Hauptverfasser:	SHISHIDO AKIRA, YAMADA ATSUTOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS HANDLING THIN OR FILAMENTARY MATERIAL MANIPULATORS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PACKING PERFORMING OPERATIONS PHYSICS PNEUMATIC TUBE CONVEYORS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To conduct accurate-positioning without overloading the substrate and without a high-precise position detector and position a substrate with high accuracy. SOLUTION: In a substrate-positioning device in which a substrate is abutted on a positioning member provided in a tool, whereby the substrate is positioned in the tool, this device comprises, a base plate 21 fixed to a robot hand 16a, a substrate-holding air cylinder 22 fixed to a position counter to each side of the base plate 21, and a substrate-holding member 24 connected to each air cylinder. When a substrate 9 abuts on a positioning member 7 so that a load acts on the air cylinder 22, there is provided an adjusting device for adjusting the pushing pressure of the cylinder to be a preset pressure.