CATADIOPTRIC OBJECTIVE LENS WITH PHYSICAL BEAM SPLITTER

PROBLEM TO BE SOLVED: To provide a catadioptric projection objective lens, capable of completely correcting chromatic aberrations by a catadioptric objective lens part by which excessive correction is executed. SOLUTION: This objective lens is provided with an objective surface 1, physical beam spli...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ULRICH WILLI, BEIERL HELMUT
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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