CATADIOPTRIC OBJECTIVE LENS WITH PHYSICAL BEAM SPLITTER

PROBLEM TO BE SOLVED: To provide a catadioptric projection objective lens, capable of completely correcting chromatic aberrations by a catadioptric objective lens part by which excessive correction is executed. SOLUTION: This objective lens is provided with an objective surface 1, physical beam spli...

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Bibliographische Detailangaben
Hauptverfasser:	ULRICH WILLI, BEIERL HELMUT
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a catadioptric projection objective lens, capable of completely correcting chromatic aberrations by a catadioptric objective lens part by which excessive correction is executed. SOLUTION: This objective lens is provided with an objective surface 1, physical beam splitter 500, concave mirror 202, image surface 84, 1st objective lens part 100 arranged between the objective surface 1 and the physical beam splitter 500, 2nd objective lens part 200 arranged between the physical beam splitter 500 and the concave mirror 202, and 3rd objective lens part 300 arranged between the physical beam splitter 500 and the image surface 84, and the 2nd objective lens part 200 includes at least two divergent lenses.