FAN FILTER UNIT, MINI-ENVIRONMENT USING THE FAN FILTER, AND CLEAN ROOM HAVING THE MINI-ENVIRONMENT

PROBLEM TO BE SOLVED: To provide a high performance and high reliability fan filter unit, having high durability against temperature as pollution by out gas is prevented from occurring, and to provide mini-environment using the fan filter unit and a clean room having the mini-environment. SOLUTION:...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NISHIKI KAZUHIRO, YANAGI SACHIKO, SASAKI HIROMI, TANAKA HIDEYUKI, MATSUNO KEIJI, KATANO MAKIKO
Format:	Patent
Sprache:	eng
Schlagworte:	AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING BLASTING HEATING LIGHTING MECHANICAL ENGINEERING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL RANGES SEPARATION TRANSPORTING VENTILATING WEAPONS
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