FAN FILTER UNIT, MINI-ENVIRONMENT USING THE FAN FILTER, AND CLEAN ROOM HAVING THE MINI-ENVIRONMENT

FAN FILTER UNIT, MINI-ENVIRONMENT USING THE FAN FILTER, AND CLEAN ROOM HAVING THE MINI-ENVIRONMENT

PROBLEM TO BE SOLVED: To provide a high performance and high reliability fan filter unit, having high durability against temperature as pollution by out gas is prevented from occurring, and to provide mini-environment using the fan filter unit and a clean room having the mini-environment. SOLUTION:...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: NISHIKI KAZUHIRO, YANAGI SACHIKO, SASAKI HIROMI, TANAKA HIDEYUKI, MATSUNO KEIJI, KATANO MAKIKO
Format: Patent
Sprache:eng
Schlagworte:
AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING
BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
RANGES
SEPARATION
TRANSPORTING
VENTILATING
WEAPONS
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a high performance and high reliability fan filter unit, having high durability against temperature as pollution by out gas is prevented from occurring, and to provide mini-environment using the fan filter unit and a clean room having the mini-environment. SOLUTION: The fan unit of an FFR 50 comprises a blower fan 53 pivotally supported on a rotary shaft 52 in a fan unit casing 51; a motor 54 for driving the blower fan 53; and a control base board 55 to control the motor 54. The motor 54 and the control base board 55 thereof are completely cut off from the blow route of the fan unit by a containing case 56. Further, a cooling pipe 57 through which air for cooling flows is situated in the containing case 56.