WATER RECOVERY SYSTEM

PROBLEM TO BE SOLVED: To provide a water recovery system which can maintain a processing volume of water through a separating membrane and the use life of the latter at a high level, and which can greatly reduce the frequency and the volume of discharge of a condensed solution so as enhance the reco...

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Bibliographische Detailangaben
Hauptverfasser: TSUBOI HIDEFUMI, SASAKO SHUICHI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a water recovery system which can maintain a processing volume of water through a separating membrane and the use life of the latter at a high level, and which can greatly reduce the frequency and the volume of discharge of a condensed solution so as enhance the recovery rate of used water. SOLUTION: In this water recovery system composed of a raw water tank for reserving therein microparticle suspending discharge water discharged from a semiconductor manufacturing plant, and a membrane type separating device connected to the raw water tank through the intermediary of a pump, for processing the microparticle suspending water so as to separate microparticle sludge from processed water, and a means for removing the suspending microparticles trapped by the separating device through reveres pressure washing, from which reverse washing water is returned to the raw water tank, a means for trapping and separating the suspending microparticles during reserve washing is provided between the reverse pressure washing means and the raw water tank.