TEG(TEST ELEMENT GROUP) PATTERN FOR EVALUATING PLASMA DAMAGE

TEG(TEST ELEMENT GROUP) PATTERN FOR EVALUATING PLASMA DAMAGE

PROBLEM TO BE SOLVED: To obtain a TEG(test element group) pattern for evaluating plasma damage which can eliminate the defective blowing out of all fuses and, at the same time, can make all gates to be able to be measured under the same condition without giving any damage to the gates. SOLUTION: A T...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: OGURA TAKEISA
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To obtain a TEG(test element group) pattern for evaluating plasma damage which can eliminate the defective blowing out of all fuses and, at the same time, can make all gates to be able to be measured under the same condition without giving any damage to the gates. SOLUTION: A TEG pattern for evaluating plasma damage is constituted in such a way that fuses have equal structures and pads used at the time of blowing out the fuses and pads used at the time of measuring the withstand voltages of gates are individually provided so that no voltage may be impressed upon the pads connected to the gates when the fuses are blown out.