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PROBLEM TO BE SOLVED: To ensure the waterproofness of a temperature detecting sensor in the vacuum chamber and also to suppress external disturbances on the tempera ture detecting sensor to improve accuracy of temperature control. SOLUTION: A hole 14 for air drawing is provided at the bottom part of...

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Bibliographische Detailangaben
Hauptverfasser: MATSUFUJI NORIYASU, UNNO KOUJI, HIDA YOSHINORI, MIURA MASAHIRO, NUMATA TETSUSHIYUU, FUJIMAKI TAKAHIRO
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To ensure the waterproofness of a temperature detecting sensor in the vacuum chamber and also to suppress external disturbances on the tempera ture detecting sensor to improve accuracy of temperature control. SOLUTION: A hole 14 for air drawing is provided at the bottom part of a protecting case 11 of the temperature detecting sensor 5 and also the temperature detecting sensor 5 is provided at the place separated from the bottom surface of a rotary chamber 3 for the waterproofing.