METHOD FOR MANUFACTURING ELECTRIC CHARGE COUPLED ELEMENT

PROBLEM TO BE SOLVED: To provide an electric charge coupled element, having no deterioration of element characteristic due to the dispersion of pitch-off voltage and the damages to a semiconductor substrate. SOLUTION: A first electrode part formed of a WSi/W film is made on a GaAs semiconductor substrate, and a second electrode part including a Pt film is formed. Here treatment is executed with a condition that a solid phase reacting layer is formed between the Pt film of the second electrode part and the semiconductor substrate and the solid phase reaction layer is not formed between the WSi/W film of the first electrode part and the semiconductor substrate. Consequently, an electric charge couple element, where the pinch-off voltage of the second electrode part becomes smaller than that of the first electrode part can be formed.