SUBSTRATE TRAY AND SUBSTRATE HOUSING METHOD

PROBLEM TO BE SOLVED: To provide a substrate tray and a substrate housing method which suppresses the warping of a substrate to be housed on the substrate tray, and enables a conveyer to automatically convey the substrate from the substrate housing apparatus, without damaging the substrate by a hand of the conveyer or without enlarging the substrate housing apparatus or lowering the housing efficiency of the substrates. SOLUTION: A substrate 6 is held on a substrate tray 1, which supports the substrate 6 with a sufficiently wide area for suppressing the warp of the substrate 6, a substrate housing apparatus (cassette) 7 houses the substrate tray 1 having the held substrate 6, the substrate tray 1 has a hand insert hole 2 for inserting a hand of a conveyer, thereby carrying the substrate tray 1 having the held substrate 6 in/out of the substrate housing apparatus.