NONCONTACT MEASURING DEVICE FOR LARGE SCALE INTEGRATED CIRCUIT

PROBLEM TO BE SOLVED: To provide an easy noncontact measuring device for an LSI capable of measuring an electrical potential fluctuation in a power wiring in the LSI even if a seal structure of the LSI is not removed. SOLUTION: The device 1 is provided with an antenna 20 for receiving a radiation el...

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Bibliographische Detailangaben
1. Verfasser: AOYAMA SHINTARO
Format: Patent
Sprache:eng
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