NONCONTACT MEASURING DEVICE FOR LARGE SCALE INTEGRATED CIRCUIT
PROBLEM TO BE SOLVED: To provide an easy noncontact measuring device for an LSI capable of measuring an electrical potential fluctuation in a power wiring in the LSI even if a seal structure of the LSI is not removed. SOLUTION: The device 1 is provided with an antenna 20 for receiving a radiation el...
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Sprache: | eng |
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