NONCONTACT MEASURING DEVICE FOR LARGE SCALE INTEGRATED CIRCUIT

PROBLEM TO BE SOLVED: To provide an easy noncontact measuring device for an LSI capable of measuring an electrical potential fluctuation in a power wiring in the LSI even if a seal structure of the LSI is not removed. SOLUTION: The device 1 is provided with an antenna 20 for receiving a radiation electromagnetic wave W from a power wiring in a LSI 10, a voltmeter 30 chronologically measuring an induced electromotive force vA by the radiation electromagnetic wave W received, a computing part 40 converting time series data P of a measurement result to a potential fluctuation vL produced in the LSI 10 by a conversion factor, an indication part 50 indicating the converted potential fluctuation vL to a measuring person. The antenna 20 is arranged in a neighborhood of the LSI 10 of a measuring object or in a state of contacting with an insulation part of the LSI 10. Preferably, an insulated metal plate 21 is added a back side of the antenna 20 to be covered against an unnecessary electromagnetic wave from other part.