SEMICONDUCTOR SUBSTRATE EVALUATOR

PROBLEM TO BE SOLVED: To accurately detect the chip of the chamfered part of a semiconductor substrate, regardless of the skill of an inspector. SOLUTION: This evaluator has a measuring thread 12 which is adjusted, so that it can be pushed against the chamfered part of a semiconductor substrate 1 be...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	NAKAZONO RYUICHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SEMICONDUCTOR DEVICES TESTING
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