SEMICONDUCTOR SUBSTRATE EVALUATOR

SEMICONDUCTOR SUBSTRATE EVALUATOR

PROBLEM TO BE SOLVED: To accurately detect the chip of the chamfered part of a semiconductor substrate, regardless of the skill of an inspector. SOLUTION: This evaluator has a measuring thread 12 which is adjusted, so that it can be pushed against the chamfered part of a semiconductor substrate 1 be...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: NAKAZONO RYUICHI
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To accurately detect the chip of the chamfered part of a semiconductor substrate, regardless of the skill of an inspector. SOLUTION: This evaluator has a measuring thread 12 which is adjusted, so that it can be pushed against the chamfered part of a semiconductor substrate 1 being provided with a chamfered part 2 at its periphery, and a tension measuring apparatus 13 which measures the tension working on the measuring thread at relative shifting between this measuring thread and the semiconductor substrate.