METHOD FOR IRRADIATION WITH ULTRAVIOLET RAY

PROBLEM TO BE SOLVED: To provide a method for irradiation with UV rays which is capable of easily adjusting the illuminance of the UV rays with which an object to be irradiated is irradiated. SOLUTION: This method consists in installing plural tubular UV lamps 12 in juxtaposition within a lamp house...

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Bibliographische Detailangaben
1. Verfasser:	SHIMAKURA TAKESHI
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F,C08G APPARATUS SPECIALLY ADAPTED THEREFOR CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS CHEMISTRY CINEMATOGRAPHY COMPOSITIONS BASED THEREON ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY GENERAL PROCESSES OF COMPOUNDING HOLOGRAPHY MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS MATERIALS THEREFOR METALLURGY ORGANIC MACROMOLECULAR COMPOUNDS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PRINTED CIRCUITS THEIR PREPARATION OR CHEMICAL WORKING-UP WORKING-UP
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method for irradiation with UV rays which is capable of easily adjusting the illuminance of the UV rays with which an object to be irradiated is irradiated. SOLUTION: This method consists in installing plural tubular UV lamps 12 in juxtaposition within a lamp house 10 in parallel to each other and irradiating the substrate 30 to be irradiated which is transferred below the same with UV rays, in which light adjustment plates 12 having many light transmission holes are disposed in a UV light path toward a lower side, by which the illuminance distribution of the UV rays with which the substrate 30 to be irradiated is irradiated is adjusted to a desired value. More particularly the light adjustment plates varying in the light transmission holes and/or array are prepared and the desired light adjustment plates 12 selected from these light adjustment plates are freely attachably and detachably disposed within the lamp house 10.