METHOD AND APPARATUS FOR X-RAY FLUORESCENT ANALYSIS

PROBLEM TO BE SOLVED: To perform an excellent analysis even for atomic species of an asymmetrical energy spectrum by conducting profile fitting at an actually measured energy spectrum by using a predetermined asymmetrical profile function. SOLUTION: The apparatus for a X-ray fluorescent analysis comprises a computer 6 for executing profile fitting using an asymmetrical profile function and a symmetrical profile function of a gauss function or a Lorentz function for introducing, for example, an asymmetrical factor to a pseudo Voigt function or a Peason VII function. A fluorescent ray table of each atomic species for constituting a sample 2 is read from a database 62, a predetermined profile function is read from a function memory 61, and an energy profile of each single atomic species is manufactured. A predetermined superposition profile is formed by using a predicted composition ratio, the fitting is repeated by changing a function parameter and the ratio until the superposition profile and the measured spectrum coincide, thereby obtaining the ratio to be obtained.