METHOD AND APPARATUS FOR ANALYING SUBSTANCE STRUCTURE

PROBLEM TO BE SOLVED: To realize an analysis at an excellent accuracy and a high efficiency by predicting a structural parameter of a substance sample for obtaining measured data of a reflecting and/or refracting phenomenon, and using a prescribed genetic algorithm. SOLUTION: A structural analysis of a substance by irradiating with an X-ray or a particle beam uses a GA or a μGA of a genetic algorithm build based on a though of a biological evolution. First, both or any of reflecting and refracting phenomena from a substance sample such as a thin film or the like is measured (S1), and a structure parameter value is predicted (S2). Then, which of the GA and the μGA is used is selected (S3), the predicted parameter value is applied to a gene of a chromosome, and processed according to each algorithm (S4, S5). When a predetermined best solution is obtained (S6), whether it falls within an allowable range of not is judged (S7). Further, when the lest square method is applied to the parameter value obtained here (S8), the parameter value having a minimum error is obtained.