FLUID VIBRATION TYPE FLOW METER
PROBLEM TO BE SOLVED: To improve a measurement accuracy over a wide range for a fluid vibration type flow meter having a micro flow rate measuring portion on the upstream in relation to a nozzle of a fluidic element. SOLUTION: A micro flow rate measuring flow passage 2 having a cross section smaller...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To improve a measurement accuracy over a wide range for a fluid vibration type flow meter having a micro flow rate measuring portion on the upstream in relation to a nozzle of a fluidic element. SOLUTION: A micro flow rate measuring flow passage 2 having a cross section smaller than a flow passage cross section of a nozzle 11 for measuring low-flow-rate is formed in a fluid guiding part 1 disposed on the upstream in relation to the nozzle 11 of a fluidic element 10. Between the micro flow rate measuring flow passage 2 and a wall portion on the other side in the opening height of the nozzle 11, a vertical partitioning portion 6 for partitioning in the opening width is disposed in a slit-like flow passage 3 formed in the opening height of the nozzle 11. A length (Li) in the flow passage direction of the fluid guiding part 1 is set at least 0.89 times of the opening height (Ws) of the micro flow rate measuring flow passage 2. |
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