METHOD FOR PRODUCING GLASS-LIKE SILICA LAYER WITH INDUCTIVELY COUPLED PLASMA TORCH AND PRODUCTION DEVICE TO BE USED

PROBLEM TO BE SOLVED: To provide a production method and a production device for accumulating a silica layer doped with a pure or proper dopant on a flat target. SOLUTION: This production device is provided with an inductively coupled plasma.torch 1 and a nozzle 9 for supplying a gas into the touch...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	PANCIATICHI CRISTINA
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMISTRY ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY GLASS MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES METALLURGY MINERAL OR SLAG WOOL PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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