ALIGNER AND CONTROL METHOD OF THE ALIGNER
PROBLEM TO BE SOLVED: To provide an aligner, where capability of performing a process regarding the operation control of the aligner is improved at a comparatively low cost, and an exposure method. SOLUTION: This aligner 100 is provided with a control means 40, which controls the operation of the al...
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| creator | KANAZUMI YUTAKA |
| description | PROBLEM TO BE SOLVED: To provide an aligner, where capability of performing a process regarding the operation control of the aligner is improved at a comparatively low cost, and an exposure method. SOLUTION: This aligner 100 is provided with a control means 40, which controls the operation of the aligner on the basis of the positional information of stages 2, 4, on which a mask and substrate 5 are mounted. The control means 40 is provided with at least one storage means 43, an input interface means 41 for directly writing the positional information in the storage means 43, and at least one processing means 44 which performs a processing on the basis of the position information written in the storage means 43. |
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| subjects | APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES |
| title | ALIGNER AND CONTROL METHOD OF THE ALIGNER |
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