ALIGNER AND CONTROL METHOD OF THE ALIGNER

ALIGNER AND CONTROL METHOD OF THE ALIGNER

PROBLEM TO BE SOLVED: To provide an aligner, where capability of performing a process regarding the operation control of the aligner is improved at a comparatively low cost, and an exposure method. SOLUTION: This aligner 100 is provided with a control means 40, which controls the operation of the al...

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Bibliographische Detailangaben
1. Verfasser: KANAZUMI YUTAKA
Format: Patent
Sprache:eng
Schlagworte:
APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide an aligner, where capability of performing a process regarding the operation control of the aligner is improved at a comparatively low cost, and an exposure method. SOLUTION: This aligner 100 is provided with a control means 40, which controls the operation of the aligner on the basis of the positional information of stages 2, 4, on which a mask and substrate 5 are mounted. The control means 40 is provided with at least one storage means 43, an input interface means 41 for directly writing the positional information in the storage means 43, and at least one processing means 44 which performs a processing on the basis of the position information written in the storage means 43.