DEVICE AND METHOD FOR PRODUCTION OF OPTICAL WAVEGUIDE FILM

PROBLEM TO BE SOLVED: To uniformly maintain the surface temperature of a substrate on a table to a desired temperature by providing the table with a heating means to heat the substrate. SOLUTION: In order to form an optical waveguide film 2, Si and halides of Ge, B, P or the like are supplied to an...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	EJIMA MASAKI, MAKIKAWA SHINJI, KONISHI SHIGERU
Format:	Patent
Sprache:	eng
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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