THIN-FILM PROCESSING METHOD AND LIQUID-CRYSTAL DISPLAY

PROBLEM TO BE SOLVED: To improve purity of a sample by eliminating the constraint on the pressure of gas for processing a sample, while promoting chemical reaction by generation of low molecular weight active species through gas decomposition. SOLUTION: A gas is introduced through a gas inlet 18, so...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KIZAWA KENICHI, CHIYABARA KENICHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS SEMICONDUCTOR DEVICES TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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