X-RAY TOMOGRAPHIC IMAGING APPARATUS

PROBLEM TO BE SOLVED: To always reconstitute a tomographic image of high image quality by determining the accurate position of a center-of-rotation axis at every tomographic position. SOLUTION: Before a tomographic image is taken, the positions of the respective center-of-rotation axes at a plurality of detection position P1-P3 in the Z-direction are detected. Thereafter, an X-ray tube, an X-ray detection part and a specimen M are relatively moved to regulate the position of the specimen M to the X-ray tube and the X-ray detection part to the imaging regulating positions H1-H5 capable of taking the tomographic images at desired imaging positions D1-D5. The positions of the center-of-rotation axes at the imaging regulating positions H1-H5 are determined on the basis of the positions of the center-of-rotation axes at a plurality of the previously detected detection positions P1-P3 to take the tomographic images at the tomographic positions D1-D5. The reconstitution parameters used in the reconstitution of a tomographic image are determined on the basis of the center-of-rotation axes determined at every imaging regulating positions H1-H5.