HEAT TREATING APPARATUS

PROBLEM TO BE SOLVED: To deal with an increase in size of a flat plate-like article such as an LCD base plate or the like, to raise heat treating capability and to suppress cost increase by constituting to heat an upper surface of a material to be heated disposed on a lower surface and a lower side of the material of an upper side by a heater disposed at an intermediate position of the material. SOLUTION: The heat treating apparatus is provided to heat treat a material (work) 3 to be heated such as an LCD base plate or the like in a heat treating chamber 1 between two parallel heaters 2. A heat insulating chamber 13 is constituted of six hot plates 2 for heating the work 3, a pin 4 of a support for supporting the work 3 oppositely to the plates 2 at an interval from the heaters 2, a hand 8 for conveying and delivering the work 3 to and from the chamber 1, and a robot 9 of a driving mechanism of the hand 8. The chamber 13 is surrounded by a heat insulator 5 and a swinging door 7, and provided with a work 3 conveying and delivering port 6. Thus, the material 3 is uniformly heated from both upper and lower surfaces of the heaters 2.