SCROLL VACUUM PUMP

SCROLL VACUUM PUMP

PROBLEM TO BE SOLVED: To obstruct the leak of process gas and the mixing of the atmosphere and floating dust in the process gas favorably. SOLUTION: In a scroll vacuum pump having annular seal parts 9, 10 buried in the slide surface 3a of a fixed rotor, a gas seal part 8 surrounding a seal part 10 i...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: KANBE MASARU
Format: Patent
Sprache:eng
Schlagworte:
BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTMACHINES FOR LIQUIDS
ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTPUMPS
WEAPONS
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To obstruct the leak of process gas and the mixing of the atmosphere and floating dust in the process gas favorably. SOLUTION: In a scroll vacuum pump having annular seal parts 9, 10 buried in the slide surface 3a of a fixed rotor, a gas seal part 8 surrounding a seal part 10 is provided between seal parts 9, 10. An annular groove 11 is provided in the gas seal part 8 and gas not giving a bad effect to process gas is supplied.