LIFE TIME MEASURING DEVICE FOR MINOR CARRIER

PROBLEM TO BE SOLVED: To prevent an S/N ratio of a device from degrading by focusing an imaging means to a condensing position of the excitation light and probe light condensed by a measuring optical system. SOLUTION: With probe light in an infrared region used, a measuring optical system comprising...

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Bibliographische Detailangaben
Hauptverfasser:	YAMAGUCHI AKASHI, KATSUMI HIDEO, TAKAMATSU HIROYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To prevent an S/N ratio of a device from degrading by focusing an imaging means to a condensing position of the excitation light and probe light condensed by a measuring optical system. SOLUTION: With probe light in an infrared region used, a measuring optical system comprising an objective lens 3, lenses 19 and 30, and half mirror 23 for condensing the pump light and probe light to the same position on the surface of a silicon wafer 1 as well as a CCD camera 9 for imaging the condensed position of the pump light and probe light, are made to focus on a condensed position on the silicon wafer 1 by an imaging optical system comprising an objective lend 3, half mirror 24, and lens 32. Thus, the measuring position on the silicon wafer 1 is easily confirmed, so S/N ratio of the device is prevented from degrading even if a probe light is used as a measurement electromagnetic wave.