VISUAL INSPECTION SYSTEM AND VISUAL INSPECTION METHOD

PROBLEM TO BE SOLVED: To reduce costs and shorten a development period by taking images by a line image sensor, and extracting defects by a software process at plurality of personal computers connected by a communication network. SOLUTION: The visual inspection system for inspecting patterns of elec...

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Bibliographische Detailangaben
Hauptverfasser: KOBAYASHI HARUOMI, KOSHISHIBA HIROYA, ISOBE MITSUNOBU, SHISHIDO CHIE, YOSHIMURA KAZUSHI, DOI HIDEAKI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To reduce costs and shorten a development period by taking images by a line image sensor, and extracting defects by a software process at plurality of personal computers connected by a communication network. SOLUTION: The visual inspection system for inspecting patterns of electronic circuit boards or the like has a group of personal computers 18a-18n connected, e.g. by a local area network 17. For example, the optical image of an object 1 to be inspected by an optical system 4 which moves on an XY stage 3 is taken into a line image sensor 5 of, e.g. a multi-tap output delay integration type or the like and inputted as a digital image signal to a personal computer 6 for image input, or the like. The image data is appropriately selected and distributed from the personal computer 6 and sent to each of personal computers 18a-18n for image processing, where the predetermined process of extracting defects from the detected image data is carried out. A required capability for the processing can be easily changed by increasing, decreasing the number of personal computers or the like manner.