OPTICAL COUPLING DEVICE AND MANUFACTURE THEREOF, AND OPTICAL FIBER MODULE

PROBLEM TO BE SOLVED: To provide an optical coupling device permitting to reduce the number of parts, having a high coupling efficiency, being easily miniaturized, and eliminating the need for an adjusting device, and a manufacturing method thereof, and an optical fiber module. SOLUTION: Various kinds of semiconductor layers forming an APD on the surface of a light transmissive n-type semiconductor substrate 20 are laminated upto a light absorbing layer (S1), and n-type semiconductor substrate 20 is polished on the back, and is then provided with reflection reducing coating (S2). Moreover, conical holes are formed at prescribed intervals on the rear face of a Si-substrate 21 (S3), and through-holes are formed by means of through-hole etching from the front face (S4). Next, the rear face of the semiconductor substrate 20 is faced to the front face of the Si-substrate 21 to cement them on each other (S5), and then, electrodes are formed on the surface of the n-type semiconductor substrate 20 (S6) and divided into each group (S7), and thus, this optical coupling device is manufactured. This optical fiber module is manufactured by inserting coated optical fibers into the through-hole parts 12 of this optical coupling device and bonding them with an optical matching agent.