FEEDING SYSTEM FOR SEMICONDUCTOR PROCESS GAS

PROBLEM TO BE SOLVED: To provide a compact semiconductor process gas feeding system with substantially improved performance of puring in a gas feeding system and safety, by reducing high-pressure regions and risk of leakages. SOLUTION: A container unit 10 as a block made up of a shut-off valve on th...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HANESAKA SATOSHI, SHIGETA KENJI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED,LIQUEFIED, OR SOLIDIFIED GASES FIXED-CAPACITY GAS-HOLDERS HEATING LIGHTING MECHANICAL ENGINEERING SEMICONDUCTOR DEVICES STORING OF DISTRIBUTING GASES OR LIQUIDS VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED ORSOLIDIFIED GASES WEAPONS
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