POSITIONING INSPECTION METHOD FOR BUMP MODULE

PROBLEM TO BE SOLVED: To shorten the time required for positioning a camera in a shorter time while holding high accuracy. SOLUTION: An oblique ray lighting means 5 is provided to light a bump module 1 comprising a number of protrusion parts 3... arranged in a specified configuration on a circuit board 2 from the direction aslant to the optical axis of a camera 4 and a coaxial lighting means 6 to light the bump module 1 from the same direction with the optical axis of the camera 4. After the camera 4 is moved roughly to the position of the interface of the bump module 1, the protrusion parts 3... alone are taken in as image by the oblique ray lighting from the oblique ray lighting means 5 and the camera 4 is moved to the interface area of the bump module 1. Thereafter, the protrusion parts 3... are lighted by the coaxial lighting from the coaxial lighting means 6 and the images of the protrusion parts 3... are taken in to inspect the protrusion parts 3...