FLUIDIC ELEMENT

PROBLEM TO BE SOLVED: To improve measurement precision of a fluidic element wherein a throttle channel part is installed on the downstream side of a channel enlarging part formed between symmetrically arranged enlarged channel forming members, and the channel enlarging part has a center on a main ci...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TOMOTA KEIICHI, NAKAMURA EIJI, OKABAYASHI MAKOTO, FUJIMOTO KUNIHIRO, IMAZAKI MASASHIGE, NAMIMOTO MASANOBU
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To improve measurement precision of a fluidic element wherein a throttle channel part is installed on the downstream side of a channel enlarging part formed between symmetrically arranged enlarged channel forming members, and the channel enlarging part has a center on a main circular arc and is constituted of a sub-circular arc part and a plane part formed of a common tangent of the main circular arc and the sub-circular arc. SOLUTION: Two main circular arcs C1 wherein two points at positions of specified displacement distances from a flow channel axis Z are made centers are formed. Plane parts 10 are formed of sub-circular arcs C2 wherein the outermost intersections of the two main circular arcs C1 and parallel lines S are made centers, and common tangents of the two main circular arcs C1. The width Tw of a target 4 is set to satisfy a relation 0.55