ELECTRON EMISSION ELEMENT AND MANUFACTURE THEREOF, AND DISPLAY DEVICE AND MANUFACTURE THEREOF

PROBLEM TO BE SOLVED: To provide an electron emission element and a manufacturing method thereof in which electron emission parts (emitters) excellent in field emission characteristic are densely formed. SOLUTION: A cathode electrode 12 and a resistor layer 13 are laminated on a lower substrate 11,...

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Bibliographische Detailangaben
Hauptverfasser: IIDA MASAMORI, TAKITA TAKAYUKI, SAITO ICHIRO, INOUE KOJI, KUROSU TATEO
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide an electron emission element and a manufacturing method thereof in which electron emission parts (emitters) excellent in field emission characteristic are densely formed. SOLUTION: A cathode electrode 12 and a resistor layer 13 are laminated on a lower substrate 11, and a plurality of emitters 15 which are constructed of an N(nitrogen)-doped diamond are randomly provided on the resistor layer 13 through an adhesion layer 14. The emitter 15 is formed by the use of a mold (mold layer 33') that is constructed of porous silicon formed by an anodizing method on the surface of a silicon substrate 31, and, thereafter, is transferred to a lower substrate 11 side. It is possible to make a bottom area of the emitter 15 exceedingly small with a sharp configuration by controlling a diameter and a height of the mold through regulation of the condition of the anodizing method. Accordingly, the degree of integration of the emitters 15 is improved, and field concentration is easily generated in an obtained electric field emission type cathode.