SURFACE POLISHING DEVICE FOR WORKPIECE AND CARRIER UTILIZED IN THIS SURFACE POLISHING DEVICE

PROBLEM TO BE SOLVED: To provide a surface polishing device for a workpiece capable of accurately performing work simplified and capable of applying work to an end face of the workpiece without giving damage to the workpiece of hard quality and a carrier utilized in this surface polishing device for...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: NOMIZO OSAMU, MATSUZAKI NOBORU, NEHASHI SABURO, YAMAGISHI TOSHIHIRO
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a surface polishing device for a workpiece capable of accurately performing work simplified and capable of applying work to an end face of the workpiece without giving damage to the workpiece of hard quality and a carrier utilized in this surface polishing device for holding the workpiec. SOLUTION: This surface polishing device for a workpiece is provided with polishing means 26, 27 slid in a contact condition with an end face of the workpiece 8 and a carrier 29 holding the workpiece so as to make its end face abut on these polishing means, so as to perform polishing by supplying a polishing fluid between the polishing means and the workpiece. Polishing surfaces 26b, 27b of the polishing means are formed flat, and a polishing fluid guide means 61 guiding the polishing fluid along the polishing surface of the polishing means is provided in the carrier 29.