SUBSTRATE HOUSING DEVICE

PROBLEM TO BE SOLVED: To suppress deflection of a housed substrate for preventing accident at transportation of the substrate by allowing a support member to support the substrate by almost central part in the specified direction, so that a cooperative part provided near the support member transports the substrate between substrate housing devices. SOLUTION: An upper surface formed of a support member 12 continuously supports a glass substrate P in Y direction while selectively supports the glass substrate P in X direction, respectively. On the upper surface of each support member 17, a communication groove (cooperative part) 18 which, square in cross section, extends in X direction is so formed as to correspond to a carrier arm 25 with a specified interval in Y direction, while communicating each other with the communication groove 18 of an adjacent support member 17. The communication groove 18 cooperates with a substrate transportation device 14 at transportation of the glass substrate P. So, the deflection is almost suppressed from occurring even when the substrate is large and thin, and the interference between the transportation device and the substrate is surely prevented at transportation of the substrate.