SEMICONDUCTOR INTEGRATED CIRCUIT-MEASURING APPARATUS

PROBLEM TO BE SOLVED: To obtain a semiconductor integrated circuit-measuring apparatus which is closer to an actual use condition and resistant to noises. SOLUTION: A potential correct circuit 12 at the power source side takes in and monitors a potential of a power source sense line 7 on a power source line in real time. A potential correct circuit 13 at the GND side takes in and monitors a signal of a GND sense line 8 on a GND line in the vicinity of a device in real time. Output terminals of the circuits are connected to a signal line 4. A tester driver 1 drives the device to be measured. In this constitution, when the monitored potential of the power source or GND becomes larger than and/or smaller than a predetermined reference potential, an output potential of the tester driver 1 is corrected. This correction can prevent a logic malfunction when a threshold potential of an input stage of the device varies due to the fluctuation of the potential of the power source or GND at the time of measuring the device. Generation of wrong measurement and wrong judgment can be reduced.