FLUID VIBRATION TYPE FLOW METER
PROBLEM TO BE SOLVED: To provide a fluid vibration type flow meter wherein the sensitivity is raised at a very low flow rate range with possibly minimizing influences of fluid vibrations on oscillations in a fluidic element. SOLUTION: A fluid entrance 1 located at the upstream of a nozzle unit 6 for...
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Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a fluid vibration type flow meter wherein the sensitivity is raised at a very low flow rate range with possibly minimizing influences of fluid vibrations on oscillations in a fluidic element. SOLUTION: A fluid entrance 1 located at the upstream of a nozzle unit 6 forming a nozzle 7 of a fluidic element is provided with a channel 2 for measuring a low flow rate having a smaller are than the flow cross sectional area of the nozzle 7, a flow sensor 16 capable of measuring the flow rate of a fluid flowing in the channel 2 is disposed at this channel 2, the opening width the channel 2 is set greater than the opening width of the nozzle 7, the opening height the channel 2 is set less than the opening height of the nozzle 7, and a detection end 16a of the flow sensor 16 is disposed facing a passage on a larger plane in the width or height direction of the channel 2. |
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